With continuing finFET device process scaling, micro loading control becomes increasingly important due to its significant impact on yield and device performance [1-2]. Micro-loading occurs when the ...
Machine learning is becoming increasingly valuable in semiconductor manufacturing, where it is being used to improve yield and throughput. This is especially important in process control, where data ...
SHANGHAI, March 16, 2021 /PRNewswire/ -- This week at SEMICON China, Advanced Micro-Fabrication Equipment Inc. China (AMEC) formally announced the Primo Twin-Star® system (Twin-Star) – a new addition ...
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